Solid-state Hydrogen sensors for measurement the small concentrations in the range                          1-1000; 1-300; 1-100 ppm.

Solid-state Hydrogen gas sensors are dedicated  for  gas leak  detectors, analyzers, transmitters in FCEV, fuel cells, storage, DGA applications  transportation, refueling and perform the long-term  life span  and stability of operation. Their technology  is  based on  the  multilayer  “Metal-Insulator-Semicondictor” (MIS) H2 sensitive structure, which changes  it’s  electrical  properties according  to the H2 gas concentration in the monitored media. Main  features of the Xmetra  H2 gas  sensing elements: Life span 10+ years; low  cross-sensitivity; operational  ambient  temperature -40°C_+120°C ; relative  humidity up to 98%; vibration/shock resistant.                It  operates  regardless  of the gas flow. Small dimensions. No moving parts. The solid-state H2  sensors are also used in Dissolved Gas Analysis (DGA) in Power Transformers Monitors, because they are able to contact directly the monitored transformer oil.


1 – Pd film; 2 – dielectric film; 3 – SiO2 layer; 4 – silicon plate; 5 – metal electrode; 6 – insulating plate; 7 – film heater; 8 – electrical contacts of the heater; 9 and 11 – electrical contacts of the MIS capacitor; 10 – thermistor

A silicon wafer coated with a SiO2 dielectric film is used as a base. An additional layer of Ta2O5 is deposited on the SiO2 layer using solid-state frequency laser radiation. Then a film of catalytic metal (Pd) is deposited onto Ta2O5. The temperature of the MIS structure is maintained in the range of 80-200 °C, measured by a thermistor and stabilized by an electronic circuit.

Solid-state H2 sensor


Leaflet   “Solid-state H2 sensor 1-1000 ppm”

Leaflet   “Solid-state H2 sensor 1-300 ppm”

Leaflet   “Solid-state H2 sensor 1-100 ppm”